KLC series for TFT

適用於TFT所有濕式清洗製程清潔,傳送,阻隔槽體間流體互通,減少基板傳輸時所產生的roller mark等等,都有相對應的完整產品線

產品規格

Physical PropertiesPhysical	Raw Material	PVA
	Gravity (Dry)	0.1 – 0.15
	Porosity (%)	85 - 95
	Pore Diameter (um)	50μm
	Water Retention (%)	900 – 1100
	Hardness (SL)	50~70SL
	Tensile Force (Dry)	24 kg/cm2
	Tensile Force (Wet)	4 kg/cm2
	Heat Resistance	60C
Cleanliness SpecCleanliness	F-	<1 ppb
	Cl-	<50 ppb
	NO3-	<50 ppb
	PO4-3	<5 ppb
	SO4-2	<20 ppb
	Na+	<5 ppb
	NH4+	<50 ppb
	K+	<1 ppb
	Li+	<1 ppb
	Mg+2	<1 ppb
	Ca+2	<5 ppb
Contamination Spec	Silicone Oil	Not Allow