Bevel Brush

KJF Bevel Brush PVA Brush roller are designed to deliver superior performance in Silicon substrate edge cleaning applications. KJF Bevel’s higher porosity design and higher structure stability provides better cleanliness and durability to prolong the brush’s service life. Unique pore design decreases the particle adsorption away from the roller’s surface , to prevent the scratch of the cleaning target.
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產品介紹

KJF Bevel Brush PVA Brush roller are designed to deliver superior performance in Silicon substrate edge cleaning applications. KJF Bevel’s higher porosity design and higher structure stability provides better cleanliness and durability to prolong the brush’s service life. Unique pore design decreases the particle adsorption away from the roller’s surface , to prevent the scratch of the cleaning target.

產品規格

Physical PropertiesPhysical Raw Material PVA
Gravity (Dry) 0.1 – 0.15
Porosity (%) 85 - 95
Pore Diameter (um) 50μm
Water Retention (%) 900 – 1100
Hardness (SL) 50~70SL
Tensile Force (Dry) 24 kg/cm2
Tensile Force (Wet) 4 kg/cm2
Heat Resistance 60°C
Cleanliness SpecCleanliness F- <1 ppb
Cl- <50 ppb
NO3- <50 ppb
PO4-3 <5 ppb
SO4-2 <20 ppb
Na+ <5 ppb
NH4+ <50 ppb
K+ <1 ppb
Li+ <1 ppb
Mg+2 <1 ppb
Ca+2 <5 ppb
Contamination Spec Silicone Oil Not Allow

應用設備

For silicon wafer edge cleaning in DNS SS3000 & SS3100

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