KLC series for TFT
適用於TFT所有濕式清洗製程清潔,傳送,阻隔槽體間流體互通,減少基板傳輸時所產生的roller mark等等,都有相對應的完整產品線
產品規格
| Physical PropertiesPhysical | Raw Material | PVA |
|---|---|---|
| Gravity (Dry) | 0.1 – 0.15 | |
| Porosity (%) | 85 - 95 | |
| Pore Diameter (um) | 50μm | |
| Water Retention (%) | 900 – 1100 | |
| Hardness (SL) | 50~70SL | |
| Tensile Force (Dry) | 24 kg/cm2 | |
| Tensile Force (Wet) | 4 kg/cm2 | |
| Heat Resistance | 60C | |
| Cleanliness SpecCleanliness | F- | <1 ppb |
| Cl- | <50 ppb | |
| NO3- | <50 ppb | |
| PO4-3 | <5 ppb | |
| SO4-2 | <20 ppb | |
| Na+ | <5 ppb | |
| NH4+ | <50 ppb | |
| K+ | <1 ppb | |
| Li+ | <1 ppb | |
| Mg+2 | <1 ppb | |
| Ca+2 | <5 ppb | |
| Contamination Spec | Silicone Oil | Not Allow |
