KLC series for TFT

适用于TFT所有湿式清洗制程清洁,发送,阻隔槽体间流体互通,减少基板传输时所生成的roller mark等等,都有相对应的完整产品线
  1. 询价
  2. 回到列表

产品规格

Physical PropertiesPhysical Raw Material PVA
Gravity (Dry) 0.1 – 0.15
Porosity (%) 85 - 95
Pore Diameter (um) 50μm
Water Retention (%) 900 – 1100
Hardness (SL) 50~70SL
Tensile Force (Dry) 24 kg/cm2
Tensile Force (Wet) 4 kg/cm2
Heat Resistance 60C
Cleanliness SpecCleanliness F- <1 ppb
Cl- <50 ppb
NO3- <50 ppb
PO4-3 <5 ppb
SO4-2 <20 ppb
Na+ <5 ppb
NH4+ <50 ppb
K+ <1 ppb
Li+ <1 ppb
Mg+2 <1 ppb
Ca+2 <5 ppb
Contamination Spec Silicone Oil Not Allow

相关产品