Bevel Brush

KJF Bevel Brush PVA Brush rollers are designed to deliver superior performance in Silicon substrate edge cleaning applications. KJF Bevel's higher porosity design and higher structure stability provides better cleanliness and durability to prolong the brush's service life. Unique pore design decreases the particle adsorption away from the roller's surface , to prevent the scratch of the cleaning target.
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product description

KJF Bevel Brush PVA Brush rollers are designed to deliver superior performance in Silicon substrate edge cleaning applications. KJF Bevel's higher porosity design and higher structure stability provides better cleanliness and durability to prolong the brush's service life. Unique pore design decreases the particle adsorption away from the roller's surface , to prevent the scratch of the cleaning target.

Product Specifications

Physical PropertiesPhysical Raw Material PVA
Gravity (Dry) 0.1 – 0.15
Porosity (%) 85 - 95
Pore Diameter (um) 50μm
Water Retention (%) 900 – 1100
Hardness (SL) 50~70SL
Tensile Force (Dry) 24 kg/cm2
Tensile Force (Wet) 4 kg/cm2
Heat Resistance 60°C
Cleanliness SpecCleanliness F- <1ppb
Cl- <50ppb
NO3- <50ppb
PO4-3 <5ppb
SO4-2 <20ppb
Na+ <5ppb
NH4+ <50ppb
K+ <1ppb
Li+ <1ppb
Mg+2 <1ppb
Ca+2 <5ppb
Contamination Spec Silicone Oil Not Allow

Application equipment

For silicon wafer edge cleaning in DNS SS3000 & SS3100

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